The Zisapel Nanoelctronics Center (MNFU)
The Zisapel Nanoelctronics Center (MNFU)
Faculty of Electrical Engineering
The Zisapel Center complements the Wolfson Microelectronics Center with approximately 700 m2 of clean-rooms.The center was built and equipped with state-of-the-art clean-rooms and individual labs.
Academic supervisor: Prof. Nir Tessler, nir@ee.technion.ac.il
Center manager: Mr. Yacov Shneider, shneider@ee.technion.ac.il Phone : 04 -829-4205
List of Equipment:
Layer formation
BTI Furnaces: Poly Si, Si3N4, Oxidation, LTO, Phos diff.
E-beam Evaporation: Airco Temescal BJD & FC 1800: Al, Al / Si / Cu, Ti, Ti/W, Si, Cr, Ni, NiCr, Pt, Au, Ta, Hf, TiW, Ge.
VST: Ti, Cr, Au, Fe, NiCr, Pd, Pt
Thermal Evaporation: Vinci: Ag, Au, Cu, Ge, Al Edwards: Sn, In
PECVD Plasma Therm: SiO2, Si3N4
Sputter ATC 2200 (deposit separately or co-sputter)
RTA JIPELEC
ALD Cambridge NanoTech: Hf, Al, Ti, Si, Ta, O3, H2O, NH3
MVD Applied MicroStructures. precursor: TMA, FDTS, APTMS
Pattern Formation
Contact Mask Aligner with Back side alignment
GCA I-line Stepper
Karl Suss HDMS vapor prime, Spinner with gyrset, automatic developer and 2 bake plates
YES oven (NH3)
Flood Exposure Tool: OAI
Dry Film Resist Laminator
Pad Printing: TPX301 Teca-Print pad 54
E-Beam lithography Vistec: EBPG5200
E-Beam lithography Raith e-LiNE
Pattern transfer
RIE Plasma Therm
YES plasma: O2
F-ICP Plasma Therm Versaline
Cl-ICP Plasma Therm
Wet benches: RCA clean, BOE, Poly etchant, Al etchant, H3PO4, KOH
Packaging
VB16 Wedge and Ball Bonder
Dicer DISCO DAD3350
Characterization
Micrometrix optical inspection, Vickers micro system CD measurement
Nanospec AFT 2100 Nanometrics
Profiler Alpha-Step 500 TENCOR
Profiler P6 KLA Tencor
Ellipsometer RUDOLPH AutoEL, Ellipsometer GAERTNER 116C
Contact Angle Goniometer with DROP image, ramé- hart Model 200
Four Point Probe FPP 5000 VEECO
C-V Plotter MDC
I-V probe station, SPA Agilent 4155C
Reflectometer Ellipsometer Woollam VASE . Multi-layer measurements wave length 193-2500nm
Dual beam FIB - Helios nano-lab G3 FEI + FEGSEM System
HITACHI S-4800, S-4700 HR SEM
Atomic Force Microscope 3000 DI